X軸測量范圍:100mm
Z1軸測量范圍:50mm
本體尺寸:651x143x138.5mm
Z2軸移動范圍:300-700mm
Z1軸測量范圍:60(水平±30)mm
直線度:0.8μm / 100mm-2μm / 100mm
X軸測量范圍:100-200mm
Z1軸測量范圍:800,80,8μm
X1軸測量范圍:200mm
X1分辨率:0.005mm
X1示值誤差20°C:(±0.3+0.002L)μm
Z1軸測量范圍:60(±30水平方向)mm
Z2軸行程范圍:500mm
直線度:0.8μm / 100mm-2μm / 200mm
本體尺寸:745x450x885mm